Micro Electro Mechanical System Design (Mechanical Engineering)

Micro Electro Mechanical System Design (Mechanical Engineering)
298 pages | Sep 22 2010 |ISBN: 0824758242| PDF | 19.5 Mb

Micro Electro Mechanical System Design presents a unified treatment of all micro electro mechanical system (MEMS) design procedures. The author focuses on the complete process required for designing and developing MEMS. Instead of focusing on only the detailed engineering and physics underlying a MEMS device, such as a gyroscope or fluidic device, this book looks at the entire process that a MEMS design engineer must consider in order to make informed technical decisions. The chapters answer important questions such as